| 摘要 |
PROBLEM TO BE SOLVED: To improve the reliability of a sample for analysis, to shorten the time for preparation of the sample, and to improve the accuracy of quantitative determination of contamination of the surface of a base, of which the amount of contamination is unknown, by dripping a sampling liquid by a small quantity in several times repeatedly onto one point of the surface of the base being heated. SOLUTION: A base 11 for a standard sample is set on a jig 12 and heated to a temperature of 110 deg.C, by using a temperature regulator 21, in a state wherein the shape of the base 11 is changed to a recessed one with the rear thereof kept in vacuum. A standard solution of which the atomic concentration is known is sampled by 100μl (the atomic weight is equivalent to 1×10<14> atoms/cm<2> ) by using a micropipette 22. The micropipette 22 is fixed at the center of the base 11 by using micropipette supports 23, 24 and 25 and a sampling liquid 15 is dripped by 2μl in 50 times separately to the center of the base 11. The result shows that the dimension of a trace of the dripped liquid is 2mm or less with respect to any samples. The detection efficiency of a working curve of the standard sample for the working curve is improved in values of the curve to be about three times better than that of the working curve prepared by a usual method.
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