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发明名称
METHOD AND DEVICE FOR MANUFACTURING SEMICONDUCTOR
摘要
申请公布号
JPH10256371(A)
申请公布日期
1998.09.25
申请号
JP19970061537
申请日期
1997.03.14
申请人
SONY CORP
发明人
KURIHARA HISAAKI
分类号
H01L21/31;H01L21/316;H01L21/768;(IPC1-7):H01L21/768
主分类号
H01L21/31
代理机构
代理人
主权项
地址
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