| 摘要 |
A system (20) includes an interface (22) for receiving a pod (36) having a carrier (48) that receives wafers (64), and that is initially enclosed within a base (46) and a pod cover (44). The system (20) also includes a mechanism (56) that transfers an exposed carrier (48) between the interface (22) and platform (38) of a mass-transfer machine (24) included in the system (20). The machine (24) includes a gantry arm (76) for transferring the carrier (48) between the platform (38) and a transfer station (78). A retainer assembly (82) is positionable over the carrier (48) at the transfer station (78), and over a process carrier (122) that is used in a process tool (32). Moveable retainers (92) of the assembly (82) receive and hold the wafers (64). The machine (24) inlcudes an elevator that moves between the transfer station (78) and the process carrier (122). The elevator extends and retracts for transferring wafers (64) between the retainers (92) and either the carrier (48) or the process carrier (122). A turntable (128), that receives the process carrier (122'), permits automatically reorienting wafers (64). |
