Electromagnetic device for plasma-assisted coating process

摘要

The device has a container with a cathode(1) and an anode for providing a cathodic arc, with a shield (3) between the cathode and a substrate holder (2) and a pair of associated coils (4,6) for providing a magnetic field for deflection of the plasma generated by the arc. A further coil may be positioned on the outside of the container in the area between the shield and the substrate holder, providing a magnetic field for focussing the plasma onto the substrate.