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申请公布号
JP2803887(B2)
申请公布日期
1998.09.24
申请号
JP19900061621
申请日期
1990.03.13
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发明人
分类号
H01L27/04;H01L21/822;(IPC1-7):H01L27/04
主分类号
H01L27/04
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