发明名称 Pressure sensor for use in corrosive atmosphere
摘要 The pressure sensor has a flexible quartz window forming part of the apparatus in which the pressure is measured , its flexure level evaluated for determining the pressure, using a Newton interference image. The Newton interference image is provided by a planar quartz plate (7), which is integrated in the apparatus, so that it defines a parallel gap with the flexible quartz window. A pressure equalisation bore may be provided in the planar quartz plate.
申请公布号 DE19711212(A1) 申请公布日期 1998.09.24
申请号 DE19971011212 申请日期 1997.03.18
申请人 FORSCHUNGSZENTRUM JUELICH GMBH, 52428 JUELICH, DE 发明人 SONNENBERG, KLAUS, DR., 52382 NIEDERZIER, DE;GIER, HEINRICH, 52382 NIEDERZIER, DE;D'ORSANEO, GIOVANNI, 52428 JUELICH, DE
分类号 G01L11/02;(IPC1-7):G01L11/02 主分类号 G01L11/02
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