发明名称 Article positioning apparatus and exposing apparatus having the same
摘要 <p>There is disclosed an article positioning apparatus for positioning an article composed of an electric conductive material over a predetermined base, the apparatus comprising: levitating means for levitating the article over the base; driving force generating means including current generating means for inducing a current in the article and magnetic field generating means for generating a magnetic field in a direction perpendicular to the current induced by the current generating means, and the driving force generating means being for generating a driving force composed of Lorentz force to the article in the direction perpendicular to the current and the magnetic field; and displacement detecting means for detecting a displacement of the article, wherein the article is positioned through the driving force generating means in accordance with a result detected by the displacement detecting means. &lt;IMAGE&gt;</p>
申请公布号 EP0866375(A2) 申请公布日期 1998.09.23
申请号 EP19980104799 申请日期 1998.03.17
申请人 NIKON CORPORATION 发明人 ONO, KAZUYA
分类号 G03F7/20;G03F9/00;(IPC1-7):G03F7/20 主分类号 G03F7/20
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