| 摘要 |
A clamp mechanism of diffusion bonding apparatus comprising a first clamp unit for gripping near the end portion of the bonding object, and a second clamp unit for gripping the bonding object at a position farther from the end portion of the bonding object than the first clamp unit, in which deformation of the end portion of the bonding object is prevented by the first clamp unit, and the second clamp unit grips so as to obtain a desired pressing force at the bonded joint of the bonding object. <IMAGE> |
