| 摘要 |
<p>PCT No. PCT/DE95/00855 Sec. 371 Date Dec. 9, 1996 Sec. 102(e) Date Dec. 9, 1996 PCT Filed Jul. 3, 1995 PCT Pub. No. WO96/01483 PCT Pub. Date Jan. 18, 1996The component has a movable section (2) over a substrate (1), in which spacers (3) preferably made of fluorocarbon are present on the top side of the substrate and prevent the movable section from adhering to the support.</p> |
