发明名称 |
TRUING METHOD OF POLISHING DISH TOOL |
摘要 |
PROBLEM TO BE SOLVED: To prevent deterioration of shape accuracy due to abrasion of a truing dish tool by truing while working fluid substantially composed of a fluid only is supplied between the polishing dish tool and the truing dish tool. SOLUTION: A polishing disk tool 105 is so constructed that a pad 102 made of polyurethane foam is stuck to the top surface of a base dish tool 104 made of cast iron through an adhesive sheet 103. A truing dish tool 101 is made of cast iron, and has a truing surface (lower surface) 101a of the substantially same form as that of a surface to be polished of lens which is a workpiece. The truing dish tool 101 is pressed to the polishing dish tool 105 by a lever pin 106. Pure water (working fluid) 201 is always supplied to the top surface of the pad 102 during truing operation. |
申请公布号 |
JPH10249695(A) |
申请公布日期 |
1998.09.22 |
申请号 |
JP19970068920 |
申请日期 |
1997.03.07 |
申请人 |
NIKON CORP |
发明人 |
MURAKAMI TOSHITAKA;SUDO MITSUYOSHI |
分类号 |
B24B53/00;B24B13/00;B24B13/02 |
主分类号 |
B24B53/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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