| 摘要 |
PROBLEM TO BE SOLVED: To provide a polished face of high accuracy and high quality free from a big projection, by using a polishing liquid composition containing the water, the polycrystalline diamond of less than a specific average size, and the grinding oil. SOLUTION: A polishing liquid composition contains the water, a polishing material and the grinding oil. As the polishing material, the polycrystalline diamond of less than 0.3 microns m of average size, particularly preferably 0.01-0.3 micron m, is used. As the grinding oil, the containing a glycol component and a surfactant, is used. As the surfactant, an anion surfactant or the like is used, As the glycol component, at least one kind selected from the derivatives such as polyethylene glycol, is used. As a typical polishing method, the polishing ids performed by bringing the abrasive cloth, an abrasive pad and a abrasive tape into contact with a surface to be plished, while supplying the polishing liquid composition on the same. Whereby a hard disc substrate free from the roughness, the burr, the burying of abrasive, or the like can be obtained. |
