| 摘要 |
PROBLEM TO BE SOLVED: To prevent the generation of a spot like pattern on the surface of a base material and to prevent the generation of a recessed part at the time of working with sand blast treatment on the surface of the base material in the production of the base material composed of an aluminum nitride ceramic. SOLUTION: At the time of firing an unfired body 8 of aluminum nitride, the unfired body is heated in a state that high purity carbon made members 6, 7 for firing are installed at least near the unfired body 8. The content of sulfur in the carbon constituting the members 6, 7 for firing is preferably <=100ppm. The surface of the unfired body is coated with the airtight members 6, 7 for firing. As the members 6, 7 of for firing, an absorbing body absorbing a discharged material discharged from the unfired body in the firing stage of the unfired body 8 can be installed. |
