发明名称 Method of fabricating an overvoltage protection device in integrated circuits
摘要 An overvoltage protection device, for inclusion within an integrated circuit, which comprises at least two conductive elements separated by a gas filled gap.
申请公布号 US5811330(A) 申请公布日期 1998.09.22
申请号 US19970901946 申请日期 1997.07.29
申请人 SGS-THOMSON MICROELECTRONICS S.A. 发明人 KALNITSKY, ALEXANDER
分类号 H01L21/764;H01L21/3205;H01L21/822;H01L21/8234;H01L23/52;H01L27/02;H01L27/04;H01L27/088;H01L29/78;(IPC1-7):H01L21/823 主分类号 H01L21/764
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