发明名称 Electron-beam biprism
摘要 There is disclosed an electron-beam biprism for use in an electron-beam holographic interference microscope. The biprism comprises a rotary plate having a hole permitting passage of an electron beam, a biprism wire mounted to the rotary plate and electrically insulated from the rotary plate, a holder, a rotating mechanism, a heating mechanism for heating the biprism wire, a voltage source for applying a voltage to the biprism wire, and a pair of grounding electrodes extending parallel to the biprism wire which bridges across the hole. The rotary plate is rotatably held by the holder so as to be rotatable about the hole. The grounding electrodes are mounted to the rotary plate. The biprism wire is sandwiched between the grounding electrodes.
申请公布号 US5811806(A) 申请公布日期 1998.09.22
申请号 US19960713962 申请日期 1996.09.12
申请人 JEOL LTD. 发明人 HONDA, TOSHIKAZU;TAKEGUCHI, MASAKI;TOMITA, TAKESHI
分类号 G21K1/087;G03H5/00;H01J37/04;H01J37/26;H01J37/295;(IPC1-7):H01J37/00 主分类号 G21K1/087
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