发明名称
摘要 PURPOSE:To obtain an improved peak versus valley ratio of current in a negative resistance by forming a quantum well on the surface of a compound semiconductor 111 and by including at least one-layer distortion layer containing, within a crystal, internal stress generated by the difference in lattice constant in the quantum well layer. CONSTITUTION:An N-GaAs contact layer 2a is allowed to grow on the plane of (111) B of an N<+>-GaAs substrate 1 then AlyGa1-yAs barrier layer 3a, an InxGa1-xAs quantum well layer 4, an AlyGa1-yAs barrier layer 3b, and an N- GaAs contact layer 2b are allowed to grow in sequence. After that, ohmic electrodes 10a and 10b are formed. Although, the original lattice constant of the InxGa1-xAs quantum well layer 4 is larger than that of the N<+>-GaAs substrate 1, the thickness is selected to be fully thinner than that generating dislocation due to the difference in lattice constant so that the quantum well layer 4 is a layer with compression stress elastically uniformly distorted. Thus, it is possible to obtain an improved peak versus valley ration of current owing to internal electric field generated by distortion.
申请公布号 JP2800245(B2) 申请公布日期 1998.09.21
申请号 JP19890087102 申请日期 1989.04.07
申请人 发明人
分类号 H01L29/201;H01L21/20;H01L29/06;H01L29/88;(IPC1-7):H01L29/88 主分类号 H01L29/201
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