发明名称
摘要 <p>PURPOSE:To enhance mechanical reliability of a sealing layer by a method wherein a hardness at a surface layer of the sealing layer is formed to be larger than a hardness at a gellike lower layer on the lower side. CONSTITUTION:A hardness at a surface layer 10a of a sealing layer 10 is formed to be larger than a hardness at a gellike lower layer 10b on the side lower than the surface layer. As a result, a hardening agent is supplied to the surface side of a gel coating material which has been filled into a cavity 1a in a hardened state or an unhardened state; the surface layer 10a is formed at a prescribed hardness. It is possible to prevent a disconnection or the like of a bonding wire, e.g. by a temperature cycle thanks to the gellike lower layer 10b of the sealing layer 10; it is possible to obtain a mechanical strength of the sealing layer 10 as a whole thanks to the surface layer 10a, of the sealing layer, whose hardness is larger than that of the gellike lower layer 10b. Thereby, it is possible to enhance mechanical reliability of the sealing layer as a whole.</p>
申请公布号 JP2799321(B2) 申请公布日期 1998.09.17
申请号 JP19890070668 申请日期 1989.03.24
申请人 发明人
分类号 H01L21/56;H01L23/28;H01L23/29;H01L23/31;H01L23/50;(IPC1-7):H01L21/56 主分类号 H01L21/56
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