Apparatus for chemical vapour deposition,申请号EP19950303956-传众专利搜索

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发明名称	Apparatus for chemical vapour deposition
摘要
申请公布号	EP0687749(B1)	申请公布日期	1998.09.16
申请号	EP19950303956	申请日期	1995.06.08
申请人	THOMAS SWAN AND CO., LTD.	发明人	CRAWLEY, JOHN ALFRED;SAYWELL, VICTOR JOHN
分类号	C30B25/02;C23C16/34;C23C16/44;C23C16/455;C30B25/14;H01L21/205;(IPC1-7):C23C16/44	主分类号	C30B25/02
代理机构		代理人
主权项
地址

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