发明名称 Interferometer having combined beam splitter compensator plate
摘要 A Michelson-type interferometer which includes apparatus for producing a suitable collimated interferometer input beam; a beam splitter and recombiner for first splitting the input beam into two beams which have components arranged to travel along parallel forward paths and then to recombine them into a single output beam as they are returned along reverse paths to the beam splitter and recombiner; an OPD scanner for scanning the optical path difference between the two split beams travelling along said paths while substantially maintaining the parallelism between the components, and a beam reverser common to the parallel beam components for reversing their direction of travel along the reverse paths and returning them for recombination into the single output beam at the beam splitter and recombiner.
申请公布号 US5808739(A) 申请公布日期 1998.09.15
申请号 US19970825432 申请日期 1997.03.28
申请人 PERKIN-ELMER LTD. 发明人 TURNER, ANDREW;MOULD, HENRY MANIFOLD
分类号 G01B9/02;G01J3/453;(IPC1-7):G01B7/02 主分类号 G01B9/02
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