Fine positioning apparatus with atomic resolution

摘要

PCT No. PCT/EP94/02844 Sec. 371 Date Feb. 26, 1997 Sec. 102(e) Date Feb. 26, 1997 PCT Filed Aug. 27, 1994 PCT Pub. No. WO96/07074 PCT Pub. Date Mar. 7, 1996A fine-positioning apparatus for a scanning probe microscope includes magnetic solenoid actuators for each of the x, y and z scanning axes of the microscope. The sample is mounted on the coil of one of the actuators for movement of the sample in the z direction while the tunnelling probe is attached to two other solenoid actuators for movement of the probe in the x and y directions.