发明名称 Apparatus for inspecting repetitive patterns
摘要 An apparatus for inspecting repetitive patterns includes a signal generation device for outputting a signal every time each of repetitive patterns reaches a predetermined observation area, and a flash generation device for generating a flash in synchronism with the signal to instantaneously illuminate each of the patterns sequentially reaching the observation area. The signal generation device may be a device for generating a signal upon detecting the predetermined shape of each pattern. The repetitive patterns may be those on a tape carrier which moves, e.g., in the longitudinal direction thereof. It is preferable to provide an image pickup device for picking up the image of each repetitive pattern on the observation area and a display device for displaying the picked-up image. The display device preferably keeps display of the picked-up image of each of the patterns illuminated by the flash for a predetermined period of time within between this illumination and the next illumination by the next flash.
申请公布号 US5808744(A) 申请公布日期 1998.09.15
申请号 US19970794390 申请日期 1997.02.06
申请人 MITSUI MINING & SMELTING CO., LTD. 发明人 MORIYA, KAZUO
分类号 G01B11/24;G01N21/956;H01L21/66;H04N7/18;(IPC1-7):G01N21/00;G01B11/00 主分类号 G01B11/24
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