Polycrystalline semiconductor thin film for semiconductor TFT on a substrate having a mobility in a longitudinal direction greater than in a width direction

摘要

A polycrystalline semiconductor thin film formed in a stripe shape on an insulating substrate wherein crystal particles are arranged in a line-texture form in a longitudinal direction of a stripe; an electric field effect mobility nu L in a longitudinal direction of a stripe is different from an electric field effect mobility nu S in a width direction of the stripe, and nu L>/=1.5x nu S is satisfied.