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发明名称
Verfahren zum thermischen Abscheiden von Silizium oder eines anderen halbleitenden Elementes
摘要
申请公布号
DE1444526(A1)
申请公布日期
1968.10.17
申请号
DE19621444526
申请日期
1962.08.24
申请人
SIEMENS AG
发明人
THEODOR RUMMEL,DR.
分类号
C01B33/02;C30B25/02
主分类号
C01B33/02
代理机构
代理人
主权项
地址
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