| 摘要 |
PROBLEM TO BE SOLVED: To provide a removal device for organic substance in which organic substance is efficiently and stably removed from water containing high- concentration organic substance such as high concentration organic-based waste liquid discharged from a semiconductor producing facility (for example, developing waste liquid discharged from a photolithographic process) and also treatment cost is reduced. SOLUTION: The removal device for organic substance in water is provided with an organic substance-oxidizing device 2, in which organic substance contained in water to be treated is oxidatively decompressed by adding ozone to water to be treated in the alkaline conditions, with an anion exchange device 6 in which OH-type strong basic anion exchange resin is used and with a reverse osmosis membrane device 8 so as to pass the water to be treated in this order. Furthermore, concentrated water of the reverse osmosis membrane device 8 is introduced into water to be treated of the organic substance-oxidizing device 2 through a return pipe 12 of concentrated water. In stead of the above- mentioned constitution, concentrated water of the reverse osmosis membrane device 8 is passed through the anion exchange device 6 and then may be introduced into water to be treated of the organic substance-oxidizing device 2. |
