| 摘要 |
PROBLEM TO BE SOLVED: To improve durability by forming a carrier plate of a material having an elastic modulus and yield stress not less than specific values, respectively. SOLUTION: A carrier plate is formed of a material having an elastic modulus not less than 1.0×10<4> kg/mm<2> and yield stress not less than 70kg/mm<2> . For example, heat treated stainless steel having a thickness about 0.6mm, an elastic modulus not less than about 2×10<4> kg/mm<2> and yield stress not less than about 80kg/mm<2> is used, and the carrier plate having a tooth 1 and a through hole 2 is formed by water jet work. By this constitution, adverse influence on a polishing object by fine chips or the like at polishing and plastic deformation by a collision of a dropping material at moving, can be prevented. Therefore, reduction in polishing accuracy can be prevented, and durability can be improved, and the service life can be lengthened. |
