| 摘要 |
PROBLEM TO BE SOLVED: To specify a defect position at a high speed by layering one-dimensional array detectors in two stages, and moving a radiation source and a radiation detector in a direction perpendicular to an arrangement direction of the one-dimensional array detectors while holding a constant relative position between the radiation source and radiation detector. SOLUTION: One-dimensional array detectors 13 comprising a radiation detector 14 directed to a radiation source 1 are layered in two stages, thereby forming a multichannel radiation detectors. An inspection body 12 is held between the radiation source 1 and the multichannel radiation detector 2. An initial position, a movement direction, a speed, an interval and a count of samplings are input from as input device 11 to a computer 9. A driving control device 5 moves the radiation source 1 and multichannel radiation detector 2 to the respective initial positions and starts moving the source 1 and detector 2 and inspecting the inspection body in response to a start signal. Two images corresponding to the one-dimensional array detectors 13 in the upper and lower stages are separated by the computer 9 from an output of the detector stored in a memory device 8 and displayed at a display device 10. An operator specifies a defect position interactively with the computer 9, displays the position and terminates the inspection.
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