| 摘要 |
PROBLEM TO BE SOLVED: To obtain an angular-velocity detecting device whose production process is simplified and whose production costs are reduced by a method wherein a Coriolis- force detecting electrode for displacement detection in the Y-axis direction is formed inside the same layer as a first beam part and a second beam part. SOLUTION: When an angular velocity in which the Z-axis direction as a direction perpendicular to a substrate 32 is used as an axis of rotation is applied to a second beam part 36, the Coriolis force acts in the X-axis direction as the long direction of a first beam part 35. As a result, due to a resultant force which is composed of the Coriolis force and of a driving force in the X-axis direction acting on the second beam part 36, the second beam part 36 is displaced by drawing an elliptical orbit along the face of the substrate 32, and an angular-velocity detecting device is constituted of the second beam part 36, of a first Coriolis-force detecting electrode 40 and of a second Coriolis-force detecting electrode 41. The detecting capacitance of a Y-axis Coriolis-force detecting capacitor 73 is changed, an output voltage which corresponds to a change in the capacitance value of the Y-axis Coriolis-force detecting capacitor 73 is output, its output signal is input to a computer unit, and the angular velocity which uses the Z-axis as the axis of rotation can be detected. |
