发明名称 METHOD OF CHECKING ARITHMETIC OPERATION PROCESSING FUNCTION IN ELECTRON BEAM LITHOGRAPHY
摘要 PROBLEM TO BE SOLVED: To realize a method of checking an arithmetic operation processing function capable of finding any trouble in a process of data transfer in a short time. SOLUTION: Once dummy drawing is started, evaluation pattern data is read out by a control CPU 11, and is supplied to a data transfer circuit 13. Figure data developed by a compression/expansion processing function in the data transfer circuit 13 is supplied to a blanker control circuit 18, a shot division circuit 24, and an adder 26 and is stored in a data memory 23. In contrast, in a reference data memory 22 data simulated previously based upon the appraisal pattern are stored as reference data. The control CPU 11 compares figure data expanded by dummy drawing and the reference figure data correctly developed with simulation beforehand stored in the reference data memory 22.
申请公布号 JPH10242027(A) 申请公布日期 1998.09.11
申请号 JP19970043336 申请日期 1997.02.27
申请人 JEOL LTD 发明人 KOMAGATA TADASHI
分类号 G03F7/20;H01L21/027;(IPC1-7):H01L21/027 主分类号 G03F7/20
代理机构 代理人
主权项
地址