| 摘要 |
PROBLEM TO BE SOLVED: To improve the horizontality of a reflecting member and to hold the tilt angle of the reflecting member constant by actuators by supporting the lower part of one side of the reflecting member through posts. SOLUTION: In the center of one side of an actuator, a 1st post 175 is formed and at both the ends of an adjacent U-shaped actuator, a 2nd post 177 and a 3rd post 180 are formed facing each other. The 1st post 175, 2nd post 177, and 3rd post 180 are positioned at the vertex parts of a triangle. One side of the reflecting member 195 is supported by the 1st post 175, 2nd post 177, and 3rd post 180, and an air gap is provided between the other side of the reflecting member 195 and an upper electrode 150 and formed in parallel to the upper electrode 150. Consequently, the reflecting member 195 is formed horizontally without curving or slanting downward. |
