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经营范围
发明名称
INTERNAL STRESS SENSOR AND FILM FORMING SYSTEM
摘要
申请公布号
JPH10239173(A)
申请公布日期
1998.09.11
申请号
JP19970043196
申请日期
1997.02.27
申请人
SHARP CORP
发明人
ABE SHINGO
分类号
G01L1/00;B81B3/00;B81C1/00;G01L1/16;H01L41/09;(IPC1-7):G01L1/00
主分类号
G01L1/00
代理机构
代理人
主权项
地址
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