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发明名称
SUBSTRATE CLEANING EQUIPMENT
摘要
申请公布号
JPH10242093(A)
申请公布日期
1998.09.11
申请号
JP19970043237
申请日期
1997.02.27
申请人
DAINIPPON SCREEN MFG CO LTD
发明人
YOSHIDA TAKESHI;MORITA AKIHIKO;YOSHIDA MASAHIRO;SASAKI TADASHI
分类号
B08B1/04;H01L21/304;(IPC1-7):H01L21/304
主分类号
B08B1/04
代理机构
代理人
主权项
地址
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