发明名称 APPARATUS AND METHOD FOR DETECTING ABNORMAL DISCHARGE FOR WIRE BONDING APPARATUS
摘要 <p>PROBLEM TO BE SOLVED: To make it possible to detect abnormal discharge caused by an inappropriate gap quantity between a wire and a discharging electrode, contamination of the wire surface and the discharging electrode, interference in discharge by an air flow, etc., by comparing a maximum output voltage held by a peak hold circuit with a dielectric breakdown voltage in a normal detection range. SOLUTION: This apparatus has a ball forming apparatus for forming a ball by applying a high voltage between a discharging electrode 4 and the tip of a wire 2 inserted into a capillary 3, and judges abnormal discharge by detecting a discharge voltage at the time of the discharge with a voltage detecting element 6. In such abnormal discharge detector as that, the maximum output voltage 12 of the output voltage waveform 10 detected with the voltage detecting element 6 is stored in a peak hold circuit 11. And the maximum output voltage 12 held in the peak hold circuit 11 is compared with a dielectric breakdown voltage in a normal detection range by a computer 14, and whether the discharge is normal or not is judged. For example, abnormal discharge is judged in the arithmetic circuit 17 of the computer 14, and displayed on a display 18.</p>
申请公布号 JPH10242200(A) 申请公布日期 1998.09.11
申请号 JP19970055556 申请日期 1997.02.24
申请人 SHINKAWA LTD 发明人 SASAKURA KAZUMASA;TERAKADO YOSHIMITSU
分类号 H01L21/60;B23K20/00;(IPC1-7):H01L21/60 主分类号 H01L21/60
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