REGRESSION CALIBRATED SPECTROSCOPIC ROTATING COMPENSATOR ELLIPSOMETER SYSTEM WITH PHOTO ARRAY DETECTOR

摘要

A spectroscopic rotating compensator material system investigation system including a photo array (DE's) for simultaneously detecting a multiplicity of wavelengths is disclosed. The spectroscopic rotating compensator material system investigation system is calibrated by a mathematical regression based technique involving, where desirable, parameterization of calibration parameters. Calibration is possible of calibration parameters. Calibration is possible utilizing a single two-dimensional data set obtained with the spectroscopic rotating compensator material system investigation system in a "material system present" or in a "straight-through" configuration.