| 摘要 |
PROBLEM TO BE SOLVED: To press a body to be bounded with a uniform pressing force for a long period by forming at least the press surface of a press plate for the body by using specific ceramics. SOLUTION: This press bonding device 11 consists of an upper press plate 12 which is fitted to a hold plate 20 fixed above across a heat insulator 21 and a lower press plate 16 which is fitted to a hold plate 22 arranged below vertically movably by a servomotor 24 across a heat insulator 23, and the press plates 12 and 16 are formed of rubber heaters 13 and 17 and ceramics plates 14 and 18 of >=2.8×10<6> kg/cm<2> in Young's modulus and <=9×10<-6> / deg.C in the coefficient of thermal expansion which are fitted to the rubber heaters 13 and 17 to constitute press surfaces 15 and 19 for the body to be bonded. Consequently, the wear of the press surfaces 15 and 19 is small even after repetitive pressing operation and deformation due to pressing force from glass substrates 2 and 3 is eliminated. |
