| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum bearing that can maintain a good lubricating characteristics without deteriorating a rotating characteristics by providing a surface phase, formed of Ni, Cr, Pt or an alloy of these elements, between a solid lubricating layer and a bearing part with the solid lubricating layer formed, thereby shutting out gas, penetrating the solid lubricating layer by the surface phase to prevent oxidation of the bearing part. SOLUTION: Solid lubricating layers formed of lead, silver, or the like are formed at the mutual contact parts of a plurality of bearing parts, constituting a vacuum bearing. At this time, a metal surface phase 31, formed on at least one material from among Ni, Cr, Pt, and an alloy of these element is formed between the bearing part, such as a ball R3 and the solid lubricating layer 32 provided thereon. If is preferable that this surface phase 31 be formed to a film thickness of about 0.05-0.1μm by an ion planting method, while the solid lubricating layer 32 be formed to a film thickness of about 0.3-0.5μm by an ion-implantation using different material from the surface phase 31. A shift preventive film formed of Ni, Ti, Sn, Pt, or the like can also be provided on the solid lubricating layer which is provided on the bearing part.
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