METHOD OF ADJUSTING WAFER TRANSFERRING APPARATUS

摘要

PROBLEM TO BE SOLVED: To eliminate the poor adjustment to clarify the cause of a trouble at the actual wafer transfer by clarifying the reference at adjusting the wafer transfer to prevent adjustment failure. SOLUTION: An adjusting jig of a wafer transfer apparatus provides a wafer hold jig 11 having a high accuracy enough to be a reference for a wafer cassette, not having a dispersion like the wafer cassette. The jig 11 comprises lower and upper plates 13, 12 and four columns 14 each having grooves at equal pitches for stacking wafers 4. When a wafer transfer unit 5 for transferring the wafers 4 between a boat and cassette laid on a cassette rack 7 is adjusted, the high accuracy waver hold jig 11 is used instead of the cassette.