WAFER HEATER

摘要

PROBLEM TO BE SOLVED: To provide a wafer heater having a wafer support board tightly bonded to a support tube and superior air-tightness with little particle contamination. SOLUTION: The heater comprises a wafer holding board 2 contg. resistance heater elements 4, thereby forming a wafer holder 1, and support tube 7 which mounts the board 2 in a treating chamber 30. Both are made of a sintered Al nitride and bonded into a unified body by baking them through an Al nitride bond layer 9 contg. rare earth oxides under the condition that the rare earth components of the bond layer 9 are diffused in the sintered Al nitride block which constitutes the board 2 and tube 7.