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发明名称
THIN FILM SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要
申请公布号
JPH10242445(A)
申请公布日期
1998.09.11
申请号
JP19970338505
申请日期
1997.12.09
申请人
CANON INC
发明人
TASHIRO KAZUAKI
分类号
H01L27/146;H01L21/336;H01L27/144;H01L29/786;(IPC1-7):H01L27/146
主分类号
H01L27/146
代理机构
代理人
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地址
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