| 摘要 |
PROBLEM TO BE SOLVED: To bring a small amount of treatment liquid uniformly into contact with a substrate, and enable treating many substrates, by spreading treatment liquid on a substrate by using a nozzle, blowing gas against the substrate by using a jet nozzle, stretching the treatment liquid on the whole surface of the substrate, and eliminating the treatment liquid spread on the substrate from it. SOLUTION: Aqua knives 1 have specified intervals for uniformly spreading releasing liquid on a substrate from the upper surface direction. Air knives 2 have specified intervals for uniformly streching the releasing liquid spread by the aqua knives 1, in the backward direction to the carrying direction of a substrate, bringing the whole part of the substrate into contact with the releasing liquid, and blowing gas uniformly against the substrate in order to eliminate the releasing liquid from the rear of the substrate. This releasing equipment is provided with, e.g. four, pairs of combination of the aqua knife 1 and the air knife 2. The time when a sensor 3 detects the position of a substrate is set as reference, and the starting times of the spreading by the aqua knives 1 and the gas blowing by the air knives 2 are determined. |
