SEMICONDUCTOR ANALYSIS DEVICE, ELECTRIC POTENTIAL DISTRIBUTION MEASURING METHOD, IMPURITY CONCENTRATION DISTRIBUTION MEASURING METHOD AND AUGER ELECTRON SPECTRUM ANALYSIS METHOD,申请号JP19970040531-传众专利搜索

发明名称	SEMICONDUCTOR ANALYSIS DEVICE, ELECTRIC POTENTIAL DISTRIBUTION MEASURING METHOD, IMPURITY CONCENTRATION DISTRIBUTION MEASURING METHOD AND AUGER ELECTRON SPECTRUM ANALYSIS METHOD
摘要
申请公布号	JPH10241619(A)	申请公布日期	1998.09.11
申请号	JP19970040531	申请日期	1997.02.25
申请人	NEC CORP	发明人	IDE TAKASHI
分类号	H01J37/244;H01J37/256;H01J37/305;H01J49/44;(IPC1-7):H01J37/244	主分类号	H01J37/244
代理机构		代理人
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