| 摘要 |
PROBLEM TO BE SOLVED: To minimize the reticle replacing time by placing at least an SMIF indexer at a reticle transfer height enough to take out a substrate from an SMID pod with its door opened to carry the pod between the indexer and mount. SOLUTION: A reticle SMIF indexer 2 is disposed at a front left part of an aligner chamber 2 and its pot mounting face is higher by a given amount from the reticle transfer height. At a front left part of the chamber 1 a pot mount 3 and mount lift 4 to move the mount 3 up and down from near a height of 800mm above the floor to near the pod mount face height of the indexer 2. Above the indexer 2 and lift 4 a robot hand 5 and vertically and horizontally moving means 6 are disposed to thereby minimize the reticle replacing time and reticle contamination during carrying. |
