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发明名称
ELECTRON BEAM DRAWING DEVICE
摘要
申请公布号
JPH10241621(A)
申请公布日期
1998.09.11
申请号
JP19970043335
申请日期
1997.02.27
申请人
JEOL LTD
发明人
YAMADA KENJI
分类号
H01J37/20;G03F7/20;H01J37/305;H01L21/027;(IPC1-7):H01J37/305
主分类号
H01J37/20
代理机构
代理人
主权项
地址
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