THIN FILM ACTUATED MIRROR ARRAY IN AN OPTICAL PROJECTION SYSTEM AND METHOD FOR MANUFACTURING THE SAME

摘要

The thin film AMA has a substrate, an actuator, a common line, and a reflecting member (180). The substrate has an electrical wiring and a connecting terminal and the actuator has a supporting layer (130), a bottom electrode (135), a top electrode (145), and an active layer (140). The common line (150) is formed on a portion of actuator and is connected to top electrode (145). The electrical wiring and connecting terminal may not be damaged because the actuator is formed on a portion of substrate adjacent to the portion where electrical wiring and connecting terminal are formed. The voltage drop of a second signal can be minimized because common line (150) is formed thickly on a portion of the actuator, so a sufficient second signal is applied to the top electrode (145). The flatness of the reflecting member (180) may be enhanced because the reflecting member (180) is formed on a second sacrificial layer.