| 摘要 |
PROBLEM TO BE SOLVED: To provide a position measuring method capable of making proper position measurement by correcting a fluctuation even when a stage is vibrated during signal reception and the wave-form of the received signal is changed. SOLUTION: The Cr pattern at the measured object portion of a mask 2 mounted on a stage 1 as a specimen is converted into an electric signal by an objective lens 3 and a CCD camera 4 serving as a detection system, and the electric signal is processed to measure the position of the Cr pattern by this position measuring method. The fluctuation quantity of the relative position between the objective lens 3 and the Cr pattern during the signal receiving time is detected, a correction value is calculated based on the fluctuation quantity, and the measured position information of the Cr pattern is corrected based on the correction value. |
