| 摘要 |
<p>PROBLEM TO BE SOLVED: To approximately perfectly avoid the contamination with external ions by using a denatured polytetrafluoroethylene as an article for the semiconductor industry. SOLUTION: A denatured polytetrafluoroethylene(PTFE) is used as an article for the semiconductor industry. A PTFE formed article is produced by the forming-sintering method or the known processing technology such as the ram extrusion process in the powder metallurgy. In the forming-sintering method a PTFE is formed by a hydraulic or hydrostatic press or automatic press in a first step at room temp. and sintered at 38.5 deg.C max. in the following step, and a billet is sintered, without supporting, in a heated furnace with an air circulation system, this approximately perfectly avoiding the contamination with external ions. No internal stress from a wafer carrier, etc., exists and it is usable for unoriented materials.</p> |
