发明名称 BONDING APPARATUS
摘要 PROBLEM TO BE SOLVED: To improve the work efficiency for pre-pressuring bearings by providing a member for finely adjusting the relative position of a rotor magnet to a stator coil of a motor for an oscillating mechanism to absorb the deviation of the mutual center position, thereby keeping the pre-pressure for the bearings always const. SOLUTION: A drive shaft 24 has a frame 20 and brushless d-c motor 31, the drive source, mounted on an outward protrudent part of the frame 10. The motor 31 has a rotor magnet 32 mounted on the drive shaft 24 and stator coil 33 disposed around the outer periphery of the magnet 32 with a predetermined very small clearance. An instruction value corresponding to the deviation of the relative position of the motor 32 to the coil 33 is given to a controller 36 to apply a given drive voltage to a piezoelectric element 35 of a fine adjuster mechanism, thereby keeping the pre-pressure applied to bearings always const. to improve the work efficiency.
申请公布号 JPH10242222(A) 申请公布日期 1998.09.11
申请号 JP19970044006 申请日期 1997.02.27
申请人 TOSHIBA CORP 发明人 SATO TSUYOSHI
分类号 H01L21/60;H01L21/607 主分类号 H01L21/60
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