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发明名称
POTTING APPARATUS
摘要
申请公布号
JPH10242180(A)
申请公布日期
1998.09.11
申请号
JP19970040204
申请日期
1997.02.25
申请人
HITACHI LTD;HITACHI TOKYO ELECTRON CO LTD
发明人
KAMATA NOBUYUKI
分类号
H01L21/56;(IPC1-7):H01L21/56
主分类号
H01L21/56
代理机构
代理人
主权项
地址
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