发明名称 FORMATION OF MINUTE TERMINAL ELECTRODE OF MULTILAYER PIEZOELECTRIC ELEMENT
摘要 PROBLEM TO BE SOLVED: To form the minute terminal electrodes of a multilayer piezoelectric element at a low cost with high accuracy by arranging a plurality of terminal electrodes at the minimum pitch and improving printing accuracy by screen-printing silver paste having viscosity which falls within a specific range correspondingly to inner electrodes exposed on the end face of the element and baking the paste. SOLUTION: A multilayer piezoelectric element 1 is constituted by exposing the end sections of inner electrodes on the end face of the element 1 as lead-out electrodes and arranging a plurality of narrow terminal electrodes in parallel with each other at the minimum pitch on the end face on which the inner electrodes are exposed. The screen printing used for the formation of the terminal electrodes is performed in such a way that silver paste supplied to the printing surface of a plate 5 having 325-mesh holes arranged in a prescribed pattern is transferred and adhered to the end face of the element with a squeegee 7. The viscosity of the screen-printed silver paste is adjusted to 800-1,500 poises. When the viscosity is <800 poises, the printing accuracy becomes worse due to the spreading of the printed pattern and, when the viscosity is >1,500 poises, indistinctive printing may result in.
申请公布号 JPH10242538(A) 申请公布日期 1998.09.11
申请号 JP19970040692 申请日期 1997.02.25
申请人 TDK CORP 发明人 DOMON TAKAAKI;SUZUKI MASANARI
分类号 H01L41/083;H01L41/22 主分类号 H01L41/083
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