STANDARD FOR CALIBRATING AND CHECKING A SURFACE INSPECTION DEVICE AND METHOD FOR THE PRODUCTION THEREOF

摘要

The invention relates to a reproducible standard for calibrating and checking the bright-field channel of a surface inspection device used for examining the flat surface of a sample and to a method for producing said standard whereby a microstructure is produced on a surface of a substrate provided as a standard, characterized in that the microstructure is smoothed out.