| 摘要 |
PROBLEM TO BE SOLVED: To provide a micro device having a hollow beam wherein warp and bend of the beam are extremely little and sensitivity is excellent, and a manufacturing method of it. SOLUTION: A three-layered laminated member which has a part 21 on a peripheral part of a recessed part 12 and a linear beam part 22 bridging the recessed part 12 is arranged on a silicon substrate 11 on which surface of the recessed part 12 is formed. The three-layered laminated member is constituted of an SiO2 film 13, an Si3 N4 film 14 and an SiO2 film 15. On the central part of the beam part 22, an element forming part composed of a single crystal silicon layer 16 is arranged. |
