| 摘要 |
PROBLEM TO BE SOLVED: To enhance the detecting efficiency of rotating angular velocity by dividing a square prismatic piezoelectric material into right and left two regions, and by polarizing the respective regions in the different directions, so that one side thereof is used as an excitation driving region and the other side thereof as a Coriollis force detecting region. SOLUTION: A piezoelectric material made of PZT ceramics which is formed in a long rectangular shape having a nearly square shape in section and extended along an oscillator axis 1 is divided into two regions making a nearly axial center of the oscillator axis 1, and the one of the two regions is used as a driving region and the other as a detecting region. In the driving region, electrodes 12 (12a, 12b) for excitation driving provided on the upper surface and electrodes 13 (13a, 13b) for feedbacking excitation signal provided on the undersurface are dividedly formed right and left respectively making a center of the rotating center 1. In the detecting region, Coriollis signal detecting electrodes 14 (14a, 14b) are dividedly formed right and left on the upper surface in the same way as the driving region, and a reference electrode 11 is formed on the entire under surface. The electrodes are formed by the silver paste screen printing or the like. Polarizing treatment is carried out in such a way that in the driving region, it is carried out so as to be parallel to the upper and lower surfaces and to be vertical to the rotating center 1, and also in the detecting region, so as to be vertical to the upper and lower surfaces, and vertical to the rotating center 1. |
